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3M FC-3283
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3M氟化液FC-3283

Introduction(产品简介)

3M氟化液FC-3283是无色透明全氟化学品,具有良好的化学惰性、电气绝缘性能、热传导性和独特的第表面张力广泛应用于半导体制造厂作为热传导介质。其液体温度范围为-50°C 至128°C,主要应用于蚀刻设备、离子注入设备、测试设备及其他设备。因为3M FC-3283是单一组分,所以其成分不好出现降解或者过期。FC-3283沸点高,其随时间的挥发也比较少。

3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time.

Physical Properties物理化学性质


Properties

FC-3283

Appearance外观

无色透明

Average Molecular Weight平均分子量

521

Boiling Point (1 atm)沸点

128℃

Pour Point倾点

﹣50℃

Estimated Critical Temperature最高承受温度

543 K

Estimated Critical Pressure最高承受压力

1180000pa

Vapor Pressure蒸汽压

1440pa

Latent Heat of Vaporization (at normal boiling point挥发潜热

78J/g

Liquid Density液体密度

1820kg/m3

Kinematic Viscosity运动粘度

0.75 centipoise

Absolute Viscosity绝对粘度

1.8centipoise

Liquid Speci?c Heat比热

1100 J/ kg°C

Liquid Thermal Conductivity导热率

0.066 W/ m°C

Coef?cient of Expansion膨胀系数

0.0012 /°C

Refractive Index折光率

1.290

Water Solubility溶水能力

<7 ppm

Solubility in Water水中溶解力

<5 ppm

Ozone Depletion Potential臭氧破坏潜值

0

Dielectric Strength介电强度

43 kV, 0.1" gap

Dielectric Constant介电常数

1.89

Electrical Resistivity绝缘强度

5.0 x 10(15)ohm cm

Not for speci?cation purposes All values determined at 25°C unless otherwise speci?ed

3M氟化液FC-3283导热性质

 

 

 

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